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超声引线键合PZT驱动信号采集分析系统
王福亮, 韩雷, 钟掘
中南大学机电工程学院, 长沙 410083
摘要:
根据超声引线键合实验平台电路结构,设计了PZT(压电陶瓷)驱动信号采集电路。在此基础上开发了基于LabView和Matlab的信号采集分析系统。针对PZT驱动电压和电流信号特征,提出了瞬时频率、相差和有效值曲线的计算方法,获得了实际键合试验过程中电流电压瞬时频率及相差变化规律。并根据有效值曲线特征,提出了分段特征点提取方法。根据大量试验分析了分段特征点的稳定性,这对于键合机理研究具有重要意义。试验结果表明,系统稳定可靠,能有效采集分析键合过程中的PZT驱动信号。
关键词:  超声引线键合  压电陶瓷驱动信号  信号采集和分析系统
DOI:
分类号:
基金项目:国家自然科学基金重大资助项目(50390064);国家重点基础研究发展计划资助项目(2003CB716202)
A PZT driver signal acquisition and analysis system for ultrasonic wire bonding
WANG Fu-liang, HAN Lei, ZHONG Jue
College of Mechanical and Electronical Engineering, Central South University, Changsha 410083, China
Abstract:
According to the circuit of ultrasonic wire bonding experiment platform,a piezoelectric transducer(PZT) driver signal acquisition circuit was designed.Then a signal acquisition and analysis system was designed with LabView and Matlab.From the characteristics of the PZT voltage and current driver signals,the methods were introduced in this system to calculate instant frequency,virtual value curve and phase difference between them.Therefore,some rules of the instant frequency and phase difference during the bonding process were obtained.And extracting method of the characteristic points(for curve division) was also introduced based on the virtual value curve characteristics.With the driver signals of 1 000 experiments,the position stability of characteristic points was analyzed,which was very important for bonding mechanism research.The experiment results showed that the system is stable and reliable and it can be used to acquire and analyze the PZT driver signal effectively.
Key words:  ultrasonic wire bonding  PZT driver signal signal  acquisition and analysis system